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Polycrystalline AlN films of fine crystallinity prepared by ion‐beam assisted deposition
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10.1063/1.109210
/content/aip/journal/apl/62/22/10.1063/1.109210
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/22/10.1063/1.109210
/content/aip/journal/apl/62/22/10.1063/1.109210
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/content/aip/journal/apl/62/22/10.1063/1.109210
1993-05-31
2014-07-12
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Polycrystalline AlN films of fine crystallinity prepared by ion‐beam assisted deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/22/10.1063/1.109210
10.1063/1.109210
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