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Self‐consistent fluid modeling of radio frequency discharges in two dimensions
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10.1063/1.109079
/content/aip/journal/apl/62/24/10.1063/1.109079
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/24/10.1063/1.109079
/content/aip/journal/apl/62/24/10.1063/1.109079
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/content/aip/journal/apl/62/24/10.1063/1.109079
1993-06-14
2014-11-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Self‐consistent fluid modeling of radio frequency discharges in two dimensions
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/24/10.1063/1.109079
10.1063/1.109079
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