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Low temperature Si3N4 direct bonding
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10.1063/1.109002
/content/aip/journal/apl/62/26/10.1063/1.109002
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/26/10.1063/1.109002
/content/aip/journal/apl/62/26/10.1063/1.109002
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/content/aip/journal/apl/62/26/10.1063/1.109002
1993-06-28
2014-07-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low temperature Si3N4 direct bonding
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/26/10.1063/1.109002
10.1063/1.109002
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