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Strong piezoelectricity in nanosized silicon nitride prepared by laser‐induced chemical vapor deposition
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10.1063/1.108946
/content/aip/journal/apl/62/3/10.1063/1.108946
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/3/10.1063/1.108946
/content/aip/journal/apl/62/3/10.1063/1.108946
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/content/aip/journal/apl/62/3/10.1063/1.108946
1993-01-18
2014-08-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Strong piezoelectricity in nanosized silicon nitride prepared by laser‐induced chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/3/10.1063/1.108946
10.1063/1.108946
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