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Nitrogen incorporation in SiO2 by rapid thermal processing of silicon and SiO2 in N2O
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10.1063/1.108995
/content/aip/journal/apl/62/3/10.1063/1.108995
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/3/10.1063/1.108995
/content/aip/journal/apl/62/3/10.1063/1.108995
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/content/aip/journal/apl/62/3/10.1063/1.108995
1993-01-18
2014-11-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nitrogen incorporation in SiO2 by rapid thermal processing of silicon and SiO2 in N2O
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/3/10.1063/1.108995
10.1063/1.108995
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