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Direct photoetching of polymer films using vacuum ultraviolet radiation generated by high‐order anti‐Stokes Raman scattering
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10.1063/1.109018
/content/aip/journal/apl/62/3/10.1063/1.109018
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/3/10.1063/1.109018
/content/aip/journal/apl/62/3/10.1063/1.109018
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/content/aip/journal/apl/62/3/10.1063/1.109018
1993-01-18
2014-11-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Direct photoetching of polymer films using vacuum ultraviolet radiation generated by high‐order anti‐Stokes Raman scattering
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/3/10.1063/1.109018
10.1063/1.109018
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