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X‐ray photoelectron spectroscopy and cross‐sectional transmission electron microscopy studies of titanium nitride/titanium/silicon structures after thermal annealing
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10.1063/1.108861
/content/aip/journal/apl/62/6/10.1063/1.108861
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/6/10.1063/1.108861
/content/aip/journal/apl/62/6/10.1063/1.108861
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/content/aip/journal/apl/62/6/10.1063/1.108861
1993-02-08
2014-10-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: X‐ray photoelectron spectroscopy and cross‐sectional transmission electron microscopy studies of titanium nitride/titanium/silicon structures after thermal annealing
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/6/10.1063/1.108861
10.1063/1.108861
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