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Substrate temperature and collimator aspect ratio effects in titanium sputtering
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10.1063/1.110703
/content/aip/journal/apl/63/13/10.1063/1.110703
http://aip.metastore.ingenta.com/content/aip/journal/apl/63/13/10.1063/1.110703
/content/aip/journal/apl/63/13/10.1063/1.110703
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/content/aip/journal/apl/63/13/10.1063/1.110703
1993-09-27
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Substrate temperature and collimator aspect ratio effects in titanium sputtering
http://aip.metastore.ingenta.com/content/aip/journal/apl/63/13/10.1063/1.110703
10.1063/1.110703
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