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SiO2 thin film deposition by radio frequency oxygen plasma enhanced laser ablation from Si
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10.1063/1.110797
/content/aip/journal/apl/63/18/10.1063/1.110797
http://aip.metastore.ingenta.com/content/aip/journal/apl/63/18/10.1063/1.110797
/content/aip/journal/apl/63/18/10.1063/1.110797
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/content/aip/journal/apl/63/18/10.1063/1.110797
1993-11-01
2014-07-13
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: SiO2 thin film deposition by radio frequency oxygen plasma enhanced laser ablation from Si
http://aip.metastore.ingenta.com/content/aip/journal/apl/63/18/10.1063/1.110797
10.1063/1.110797
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