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Combustion chemical vapor deposition: A novel thin‐film deposition technique
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10.1063/1.110362
/content/aip/journal/apl/63/2/10.1063/1.110362
http://aip.metastore.ingenta.com/content/aip/journal/apl/63/2/10.1063/1.110362
/content/aip/journal/apl/63/2/10.1063/1.110362
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/content/aip/journal/apl/63/2/10.1063/1.110362
1993-07-12
2015-07-08
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Combustion chemical vapor deposition: A novel thin‐film deposition technique
http://aip.metastore.ingenta.com/content/aip/journal/apl/63/2/10.1063/1.110362
10.1063/1.110362
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