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Hydrogenating silicon dioxide in an electron cyclotron plasma
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10.1063/1.110134
/content/aip/journal/apl/63/25/10.1063/1.110134
http://aip.metastore.ingenta.com/content/aip/journal/apl/63/25/10.1063/1.110134
/content/aip/journal/apl/63/25/10.1063/1.110134
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/content/aip/journal/apl/63/25/10.1063/1.110134
1993-12-20
2014-08-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Hydrogenating silicon dioxide in an electron cyclotron plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/63/25/10.1063/1.110134
10.1063/1.110134
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