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Ion beam mixing for enhanced electron tunneling in metal‐oxide‐silicon structures
1.M. Lenzlinger and E. H. Snow, J. Appl. Phys. 40, 278 (1969).
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3.See for instance, Ion Implantation and Beam Processing, edited by J. S. Williams and J. M. Poate (Academic, Sydney 1984), Chap. 7.
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6.A. Kalnitsky, A. R. Boothroyd, and J. P. Ellul, IEDM Tech. Dig. 1988, 516 (1988).
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