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Ion beam mixing for enhanced electron tunneling in metal‐oxide‐silicon structures
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10.1063/1.109899
/content/aip/journal/apl/63/6/10.1063/1.109899
http://aip.metastore.ingenta.com/content/aip/journal/apl/63/6/10.1063/1.109899
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/content/aip/journal/apl/63/6/10.1063/1.109899
1993-08-09
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ion beam mixing for enhanced electron tunneling in metal‐oxide‐silicon structures
http://aip.metastore.ingenta.com/content/aip/journal/apl/63/6/10.1063/1.109899
10.1063/1.109899
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