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Open air deposition of SiO2 film from a cold plasma torch of tetramethoxysilane‐H2‐Ar system
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10.1063/1.110916
/content/aip/journal/apl/64/1/10.1063/1.110916
http://aip.metastore.ingenta.com/content/aip/journal/apl/64/1/10.1063/1.110916
/content/aip/journal/apl/64/1/10.1063/1.110916
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/content/aip/journal/apl/64/1/10.1063/1.110916
1994-01-03
2014-07-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Open air deposition of SiO2 film from a cold plasma torch of tetramethoxysilane‐H2‐Ar system
http://aip.metastore.ingenta.com/content/aip/journal/apl/64/1/10.1063/1.110916
10.1063/1.110916
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