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Preparation of epitaxial AlN films by electron cyclotron resonance plasma‐assisted chemical vapor deposition on Ir‐ and Pt‐coated sapphire substrates
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10.1063/1.111934
/content/aip/journal/apl/64/11/10.1063/1.111934
http://aip.metastore.ingenta.com/content/aip/journal/apl/64/11/10.1063/1.111934
/content/aip/journal/apl/64/11/10.1063/1.111934
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/content/aip/journal/apl/64/11/10.1063/1.111934
1994-03-14
2014-07-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Preparation of epitaxial AlN films by electron cyclotron resonance plasma‐assisted chemical vapor deposition on Ir‐ and Pt‐coated sapphire substrates
http://aip.metastore.ingenta.com/content/aip/journal/apl/64/11/10.1063/1.111934
10.1063/1.111934
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