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Large‐numerical‐aperture microlens fabrication by one‐step etching and mass‐transport smoothing
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10.1063/1.111892
/content/aip/journal/apl/64/12/10.1063/1.111892
http://aip.metastore.ingenta.com/content/aip/journal/apl/64/12/10.1063/1.111892
/content/aip/journal/apl/64/12/10.1063/1.111892
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/content/aip/journal/apl/64/12/10.1063/1.111892
1994-03-21
2014-12-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Large‐numerical‐aperture microlens fabrication by one‐step etching and mass‐transport smoothing
http://aip.metastore.ingenta.com/content/aip/journal/apl/64/12/10.1063/1.111892
10.1063/1.111892
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