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Frequency effects in capacitively coupled radio‐frequency glow discharges: A comparison between experiments and a two‐dimensional fluid model
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10.1063/1.111806
/content/aip/journal/apl/64/14/10.1063/1.111806
http://aip.metastore.ingenta.com/content/aip/journal/apl/64/14/10.1063/1.111806
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/content/aip/journal/apl/64/14/10.1063/1.111806
1994-04-04
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Frequency effects in capacitively coupled radio‐frequency glow discharges: A comparison between experiments and a two‐dimensional fluid model
http://aip.metastore.ingenta.com/content/aip/journal/apl/64/14/10.1063/1.111806
10.1063/1.111806
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