No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Maskless patterning of indium tin oxide layer for flat panel displays by diode‐pumped Nd:YLF laser irradiation
1.D. E. Carlson, Semiconductors and Semimetals, edited by J. I. Pankove (Academic, New York, 1984), Vol. 21, p. 7.
2.M. Hoheisel, A. Mitwalsky, and C. Mrotzek, Phys. Status Solidi A 123, 461 (1991).
3.M. Mohri, H. Kakinuma, M. Sakamoto, and H. Sawai, Jpn. J. Appl. Phys. 29, L1932 (1990).
4.Laser Processing and Diagnostics, edited by D. Bäuerle (Springer, Heidelberg, 1984), p. 162.
5.Laser Microfabrication: Thin Film Processes and Lithography, edited by D. J. Ehrlich and J. Y. Tsao (Academic, San Diego, 1989), p. 333.
6.A. Khachatourians, in Proceedings of the 1986 International Symposium on Microelectronics (Int. Soc. Hybrid Microelectron., Reston, 1986), p. 100.
7.C. H. L. Weijtens, Thin Solid Films 196, 1 (1991).
Article metrics loading...
Full text loading...
Most read this month
Most cited this month