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Fluorine ion etching of lead zirconate‐titanate thin films
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10.1063/1.111185
/content/aip/journal/apl/64/3/10.1063/1.111185
http://aip.metastore.ingenta.com/content/aip/journal/apl/64/3/10.1063/1.111185
/content/aip/journal/apl/64/3/10.1063/1.111185
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/content/aip/journal/apl/64/3/10.1063/1.111185
1994-01-17
2014-09-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fluorine ion etching of lead zirconate‐titanate thin films
http://aip.metastore.ingenta.com/content/aip/journal/apl/64/3/10.1063/1.111185
10.1063/1.111185
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