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Investigation of the stresses in continuous thin films and patterned lines by x‐ray diffraction
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10.1063/1.110944
/content/aip/journal/apl/64/9/10.1063/1.110944
http://aip.metastore.ingenta.com/content/aip/journal/apl/64/9/10.1063/1.110944
/content/aip/journal/apl/64/9/10.1063/1.110944
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/content/aip/journal/apl/64/9/10.1063/1.110944
1994-02-28
2014-08-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Investigation of the stresses in continuous thin films and patterned lines by x‐ray diffraction
http://aip.metastore.ingenta.com/content/aip/journal/apl/64/9/10.1063/1.110944
10.1063/1.110944
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