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Determination of the composition and thickness of borophosphosilicate glass films by infrared ellipsometry
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10.1063/1.112081
/content/aip/journal/apl/65/10/10.1063/1.112081
http://aip.metastore.ingenta.com/content/aip/journal/apl/65/10/10.1063/1.112081
/content/aip/journal/apl/65/10/10.1063/1.112081
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/content/aip/journal/apl/65/10/10.1063/1.112081
1994-09-05
2014-08-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Determination of the composition and thickness of borophosphosilicate glass films by infrared ellipsometry
http://aip.metastore.ingenta.com/content/aip/journal/apl/65/10/10.1063/1.112081
10.1063/1.112081
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