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Fast two‐dimensional self‐consistent kinetic modeling of low‐pressure inductively coupled RF discharges
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10.1063/1.112050
/content/aip/journal/apl/65/11/10.1063/1.112050
http://aip.metastore.ingenta.com/content/aip/journal/apl/65/11/10.1063/1.112050
/content/aip/journal/apl/65/11/10.1063/1.112050
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/content/aip/journal/apl/65/11/10.1063/1.112050
1994-09-12
2014-08-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fast two‐dimensional self‐consistent kinetic modeling of low‐pressure inductively coupled RF discharges
http://aip.metastore.ingenta.com/content/aip/journal/apl/65/11/10.1063/1.112050
10.1063/1.112050
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