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Study on growth processes of particulates in helium‐diluted silane rf plasmas using scanning electron microscopy
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10.1063/1.112833
/content/aip/journal/apl/65/15/10.1063/1.112833
http://aip.metastore.ingenta.com/content/aip/journal/apl/65/15/10.1063/1.112833
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/content/aip/journal/apl/65/15/10.1063/1.112833
1994-10-10
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Study on growth processes of particulates in helium‐diluted silane rf plasmas using scanning electron microscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/65/15/10.1063/1.112833
10.1063/1.112833
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