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In situ laser‐induced fluorescence studies of laser chemical vapor deposition of TiN thin films
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10.1063/1.112352
/content/aip/journal/apl/65/3/10.1063/1.112352
http://aip.metastore.ingenta.com/content/aip/journal/apl/65/3/10.1063/1.112352
/content/aip/journal/apl/65/3/10.1063/1.112352
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/content/aip/journal/apl/65/3/10.1063/1.112352
1994-07-18
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: In situ laser‐induced fluorescence studies of laser chemical vapor deposition of TiN thin films
http://aip.metastore.ingenta.com/content/aip/journal/apl/65/3/10.1063/1.112352
10.1063/1.112352
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