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Stress relaxation in plasma deposited tungsten nitride/tungsten bilayer
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10.1063/1.112163
/content/aip/journal/apl/65/8/10.1063/1.112163
http://aip.metastore.ingenta.com/content/aip/journal/apl/65/8/10.1063/1.112163
/content/aip/journal/apl/65/8/10.1063/1.112163
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/content/aip/journal/apl/65/8/10.1063/1.112163
1994-08-22
2014-10-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Stress relaxation in plasma deposited tungsten nitride/tungsten bilayer
http://aip.metastore.ingenta.com/content/aip/journal/apl/65/8/10.1063/1.112163
10.1063/1.112163
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