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Si nanostructures fabricated by anodic oxidation with an atomic force microscope and etching with an electron cyclotron resonance source
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10.1063/1.113348
/content/aip/journal/apl/66/14/10.1063/1.113348
http://aip.metastore.ingenta.com/content/aip/journal/apl/66/14/10.1063/1.113348
/content/aip/journal/apl/66/14/10.1063/1.113348
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/content/aip/journal/apl/66/14/10.1063/1.113348
1995-04-03
2014-09-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Si nanostructures fabricated by anodic oxidation with an atomic force microscope and etching with an electron cyclotron resonance source
http://aip.metastore.ingenta.com/content/aip/journal/apl/66/14/10.1063/1.113348
10.1063/1.113348
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