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Growth of clean amorphous silicon–carbon alloy films by hot‐filament assisted chemical vapor deposition technique
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10.1063/1.113352
/content/aip/journal/apl/66/14/10.1063/1.113352
http://aip.metastore.ingenta.com/content/aip/journal/apl/66/14/10.1063/1.113352
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/content/aip/journal/apl/66/14/10.1063/1.113352
1995-04-03
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Growth of clean amorphous silicon–carbon alloy films by hot‐filament assisted chemical vapor deposition technique
http://aip.metastore.ingenta.com/content/aip/journal/apl/66/14/10.1063/1.113352
10.1063/1.113352
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