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Nanoscale hardness and microfriction of titanium nitride films deposited from the reaction of tetrakis (dimethylamino) titanium with ammonia
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10.1063/1.113313
/content/aip/journal/apl/66/15/10.1063/1.113313
http://aip.metastore.ingenta.com/content/aip/journal/apl/66/15/10.1063/1.113313
/content/aip/journal/apl/66/15/10.1063/1.113313
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/content/aip/journal/apl/66/15/10.1063/1.113313
1995-04-10
2014-08-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nanoscale hardness and microfriction of titanium nitride films deposited from the reaction of tetrakis (dimethylamino) titanium with ammonia
http://aip.metastore.ingenta.com/content/aip/journal/apl/66/15/10.1063/1.113313
10.1063/1.113313
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