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Phosphorus ablation process as a hydrogen atom probe in a remote H2 plasma reactor
1.T. Sugino, K. Kawarai, M. Maeda, and J. Shirafuji, J. Cryst. Growth 139, 15 (1994).
2.M. Naitoh, T. Soga, T. Jimbo, and M. Umeno, J. Cryst. Growth 93, 52 (1994).
3.E. J. Petit, F. Houzay, and J. M. Moison, Surf. Sci. 269/270, 902 (1992).
4.R. N. Glew, A. R. Adams, C. G. Crookes, P. D. Greene, S. N. Holmes, S. A. Kitching, P. Klipstein, D. Lancefield, R. A. Stradling, and R. A. Wooley, Semicond. Sci. Technol. 6, 1088 (1991).
5.K. Tachibana, Proceedings of the 11th International Symposium on Plasma Chemistry (IUPAC), Aug. 22–27, 1993, Loughborough, England, edited by J. Harry, p. 344.
6.L. St-Onge and M. Moison, Plasma Chem. Plasma Process. 14, 87 (1994).
7.G. Bruno, M. Losurdo, and P. Capezzuto,J. Vac. Sci. Technol. B 13,
8.G. Bruno, M. Losurdo, G. Cicala, and P. Capezzuto, Proceedings of the 6th International Conference on Indium Phosphide and Related Materials (IPRM), March 27–31, 1994, Santa Barbara, CA (IEEE, Piscataway, NJ, 1994), p. 94.
9.V. N. Kondratiev, Rate Constants of Gas Phase Reactions - Reference Book, edited by R. M. Fristrom (Office of Standard Reference Data, NBS, Washington, DC, 1972).
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