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Room temperature electron cyclotron resonance chemical vapor deposition of high quality TiN
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10.1063/1.113525
/content/aip/journal/apl/66/3/10.1063/1.113525
http://aip.metastore.ingenta.com/content/aip/journal/apl/66/3/10.1063/1.113525
/content/aip/journal/apl/66/3/10.1063/1.113525
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/content/aip/journal/apl/66/3/10.1063/1.113525
1995-01-16
2014-07-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Room temperature electron cyclotron resonance chemical vapor deposition of high quality TiN
http://aip.metastore.ingenta.com/content/aip/journal/apl/66/3/10.1063/1.113525
10.1063/1.113525
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