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Development of an optical emission spectroscopy‐based method for dynamic compositional analysis of sputter deposited films from multicomponent targets
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10.1063/1.114096
/content/aip/journal/apl/66/6/10.1063/1.114096
http://aip.metastore.ingenta.com/content/aip/journal/apl/66/6/10.1063/1.114096
/content/aip/journal/apl/66/6/10.1063/1.114096
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/content/aip/journal/apl/66/6/10.1063/1.114096
1995-02-06
2014-08-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Development of an optical emission spectroscopy‐based method for dynamic compositional analysis of sputter deposited films from multicomponent targets
http://aip.metastore.ingenta.com/content/aip/journal/apl/66/6/10.1063/1.114096
10.1063/1.114096
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