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Activation of ion implanted dopants in α‐SiC
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10.1063/1.114108
/content/aip/journal/apl/66/6/10.1063/1.114108
http://aip.metastore.ingenta.com/content/aip/journal/apl/66/6/10.1063/1.114108
/content/aip/journal/apl/66/6/10.1063/1.114108
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/content/aip/journal/apl/66/6/10.1063/1.114108
1995-02-06
2014-08-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Activation of ion implanted dopants in α‐SiC
http://aip.metastore.ingenta.com/content/aip/journal/apl/66/6/10.1063/1.114108
10.1063/1.114108
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