Influence of misfit dislocations on the surface morphology of Si1−x Ge x films
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8.Since the vertical scale of Fig. 2 is greatly expanded compared to the horizontal scale, the steps seen there are actually not particularly sharp. For example, the step riser seen in Fig. 2(c) has an angle of only 1° relative to the horizontal. This rounding of the step edges is attributed to film overgrowth.
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10.J. P. Hirth and J. Lothe, Theory of Dislocations, 2nd ed. (Krieger, Malabar, FL, 1992). Our results for the surface displacement due to an edge dislocation come from an extension of their results for bulk displacements (pp. 76–78). We consider an incompressible isotropic solid (Poisson ratio of 1/2), and apply the method of images (p. 86f) to an edge dislocation with its glide plane oriented at 35.3° relative to the surface. For the displacement normal to the surface (the quantity plotted in Fig. 3), we find that the result for the surface case is exactly twice the corresponding displacement in the bulk. The screw component of the dislocation causes no surface displacement.
11.T. Nakamura, M. Ohno, K. Ashikaga, and S. Ohno, Extended Abstracts of the 1992 Conf. on Solid State Devices and Materials, Tsukuba, 1992, p. 629.
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