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In situ optical diagnosis on hydrogenated amorphous silicon grown by vibration superimposed plasma chemical vapor deposition
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10.1063/1.114284
/content/aip/journal/apl/66/9/10.1063/1.114284
http://aip.metastore.ingenta.com/content/aip/journal/apl/66/9/10.1063/1.114284
/content/aip/journal/apl/66/9/10.1063/1.114284
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/content/aip/journal/apl/66/9/10.1063/1.114284
1995-02-27
2014-11-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: In situ optical diagnosis on hydrogenated amorphous silicon grown by vibration superimposed plasma chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/66/9/10.1063/1.114284
10.1063/1.114284
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