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Combined differential amplitude and phase interferometer with a single probe beam
1.J. C. Wyant and K. N. Prettyjohns, U. S. Patent No. 4,639,139, Optical profiler using improved phase shifting interferometry (27 January 1987).
2.J. F. Biegen, U. S. Patent No. 4,732,483 (22 March 1988).
3.H. P. Ho, M. G. Somekh, M. Liu, and C. W. See, Measure. Sci. Technol. 5, 1480 (1994).
4.M. J. Downs, W. H. McGivern, and H. J. Ferguson, Precis. Eng. 7, 211 (1985).
5.M. J. Offside, M. G. Somekh, and C. W. See, Appl. Phys. Lett. 55, 2051 (1989).
6.C. W. See and M. Vaez-Iravani, Appl. Opt. 27, 2786 (1988).
7.G. Makosch and B. Drollinger, Appl. Opt. 23, 4544 (1984).
8.M. S. Valera, M. G. Somekh, and R. K. Appel, Electron. Lett. 27, 719 (1991).
9.A full discussion of the optical transfer function with circular pupils based on Refs. 11 and 12 will be given in a future paper.
10.T. Wilson and C. J. R. Shepard, Theory and Practice of Scanning Optical Microscopy (Academic, London, 1990).
11.M. G. Somekh, J. Microscopy 168, 131 (1992).
12.J. E. Greivenkamp, Opt. Eng. 23, 350 (1984).
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