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Impact of supplemental implantation of oxygen on defect centers in the separation by implantation of oxygen structure
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10.1063/1.114506
/content/aip/journal/apl/67/10/10.1063/1.114506
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/10/10.1063/1.114506
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/content/aip/journal/apl/67/10/10.1063/1.114506
1995-09-04
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Impact of supplemental implantation of oxygen on defect centers in the separation by implantation of oxygen structure
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/10/10.1063/1.114506
10.1063/1.114506
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