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Low‐temperature, uniform, and high‐density plasma produced by a new ultra‐high‐frequency discharge with a spokewise antenna
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10.1063/1.114511
/content/aip/journal/apl/67/10/10.1063/1.114511
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/10/10.1063/1.114511
/content/aip/journal/apl/67/10/10.1063/1.114511
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/content/aip/journal/apl/67/10/10.1063/1.114511
1995-09-04
2014-09-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low‐temperature, uniform, and high‐density plasma produced by a new ultra‐high‐frequency discharge with a spokewise antenna
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/10/10.1063/1.114511
10.1063/1.114511
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