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Dry etch damage in InN, InGaN, and InAlN
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10.1063/1.114334
/content/aip/journal/apl/67/16/10.1063/1.114334
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/16/10.1063/1.114334
/content/aip/journal/apl/67/16/10.1063/1.114334
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/content/aip/journal/apl/67/16/10.1063/1.114334
1995-10-16
2014-12-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dry etch damage in InN, InGaN, and InAlN
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/16/10.1063/1.114334
10.1063/1.114334
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