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A gas phase chemical etchant for boron nitride films
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10.1063/1.115137
/content/aip/journal/apl/67/16/10.1063/1.115137
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/16/10.1063/1.115137
/content/aip/journal/apl/67/16/10.1063/1.115137
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/content/aip/journal/apl/67/16/10.1063/1.115137
1995-10-16
2014-11-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A gas phase chemical etchant for boron nitride films
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/16/10.1063/1.115137
10.1063/1.115137
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