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Deposition of extremely thin (Ba,Sr)TiO3 thin films for ultra‐large‐scale integrated dynamic random access memory application
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10.1063/1.114795
/content/aip/journal/apl/67/19/10.1063/1.114795
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/19/10.1063/1.114795
/content/aip/journal/apl/67/19/10.1063/1.114795
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/content/aip/journal/apl/67/19/10.1063/1.114795
1995-11-06
2014-12-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Deposition of extremely thin (Ba,Sr)TiO3 thin films for ultra‐large‐scale integrated dynamic random access memory application
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/19/10.1063/1.114795
10.1063/1.114795
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