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Epitaxial silicon growth using supersonic jets of disilane: A model study of energetic jet deposition
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10.1063/1.114822
/content/aip/journal/apl/67/20/10.1063/1.114822
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/20/10.1063/1.114822
/content/aip/journal/apl/67/20/10.1063/1.114822
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/content/aip/journal/apl/67/20/10.1063/1.114822
1995-11-13
2014-07-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Epitaxial silicon growth using supersonic jets of disilane: A model study of energetic jet deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/20/10.1063/1.114822
10.1063/1.114822
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