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Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering
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10.1063/1.114845
/content/aip/journal/apl/67/20/10.1063/1.114845
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/20/10.1063/1.114845
/content/aip/journal/apl/67/20/10.1063/1.114845
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/content/aip/journal/apl/67/20/10.1063/1.114845
1995-11-13
2014-07-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/20/10.1063/1.114845
10.1063/1.114845
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