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Imprint of sub‐25 nm vias and trenches in polymers
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10.1063/1.114851
/content/aip/journal/apl/67/21/10.1063/1.114851
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/21/10.1063/1.114851
/content/aip/journal/apl/67/21/10.1063/1.114851
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/content/aip/journal/apl/67/21/10.1063/1.114851
1995-11-20
2014-10-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Imprint of sub‐25 nm vias and trenches in polymers
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/21/10.1063/1.114851
10.1063/1.114851
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