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Origin of compositional variations in sputter‐deposited Ti x W1−x diffusion barrier layers
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10.1063/1.114878
/content/aip/journal/apl/67/21/10.1063/1.114878
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/21/10.1063/1.114878
/content/aip/journal/apl/67/21/10.1063/1.114878
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/content/aip/journal/apl/67/21/10.1063/1.114878
1995-11-20
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Origin of compositional variations in sputter‐deposited TixW1−x diffusion barrier layers
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/21/10.1063/1.114878
10.1063/1.114878
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