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Direct bonding of piezoelectric crystal onto silicon
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10.1063/1.114896
/content/aip/journal/apl/67/22/10.1063/1.114896
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/22/10.1063/1.114896
/content/aip/journal/apl/67/22/10.1063/1.114896
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/content/aip/journal/apl/67/22/10.1063/1.114896
1995-11-27
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Direct bonding of piezoelectric crystal onto silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/22/10.1063/1.114896
10.1063/1.114896
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