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Deposition of high dielectric constant materials by dual spectral sources assisted metalorganic chemical vapor deposition
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10.1063/1.114411
/content/aip/journal/apl/67/26/10.1063/1.114411
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/26/10.1063/1.114411
/content/aip/journal/apl/67/26/10.1063/1.114411
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/content/aip/journal/apl/67/26/10.1063/1.114411
1995-12-25
2014-10-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Deposition of high dielectric constant materials by dual spectral sources assisted metalorganic chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/26/10.1063/1.114411
10.1063/1.114411
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