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Preparation of nitrogen containing carbon films using chemical vapor deposition enhanced by electron cyclotron resonance plasma
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10.1063/1.115442
/content/aip/journal/apl/67/3/10.1063/1.115442
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/3/10.1063/1.115442
/content/aip/journal/apl/67/3/10.1063/1.115442
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/content/aip/journal/apl/67/3/10.1063/1.115442
1995-07-17
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Preparation of nitrogen containing carbon films using chemical vapor deposition enhanced by electron cyclotron resonance plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/3/10.1063/1.115442
10.1063/1.115442
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