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Effect of electrode material on measured ion energy distributions in radio‐frequency discharges
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10.1063/1.114540
/content/aip/journal/apl/67/4/10.1063/1.114540
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/4/10.1063/1.114540
/content/aip/journal/apl/67/4/10.1063/1.114540
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/content/aip/journal/apl/67/4/10.1063/1.114540
1995-07-24
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of electrode material on measured ion energy distributions in radio‐frequency discharges
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/4/10.1063/1.114540
10.1063/1.114540
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