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Applicability of one‐dimensional diffusion model for step coverage analysis—Comparison with a simple Monte Carlo method
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10.1063/1.115408
/content/aip/journal/apl/67/5/10.1063/1.115408
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/5/10.1063/1.115408
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/content/aip/journal/apl/67/5/10.1063/1.115408
1995-07-31
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Applicability of one‐dimensional diffusion model for step coverage analysis—Comparison with a simple Monte Carlo method
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/5/10.1063/1.115408
10.1063/1.115408
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