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Improvement of hydrogenated amorphous silicon germanium alloys using low power disilane–germane discharges without hydrogen dilution
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10.1063/1.114395
/content/aip/journal/apl/67/9/10.1063/1.114395
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/9/10.1063/1.114395
/content/aip/journal/apl/67/9/10.1063/1.114395
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/content/aip/journal/apl/67/9/10.1063/1.114395
1995-08-28
2014-09-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Improvement of hydrogenated amorphous silicon germanium alloys using low power disilane–germane discharges without hydrogen dilution
http://aip.metastore.ingenta.com/content/aip/journal/apl/67/9/10.1063/1.114395
10.1063/1.114395
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