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The effect of stress on the resistivity of submicron aluminum lines
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10.1063/1.116137
/content/aip/journal/apl/68/17/10.1063/1.116137
http://aip.metastore.ingenta.com/content/aip/journal/apl/68/17/10.1063/1.116137
/content/aip/journal/apl/68/17/10.1063/1.116137
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/content/aip/journal/apl/68/17/10.1063/1.116137
1996-04-22
2014-07-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The effect of stress on the resistivity of submicron aluminum lines
http://aip.metastore.ingenta.com/content/aip/journal/apl/68/17/10.1063/1.116137
10.1063/1.116137
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